Name: Low flow gas Flow Meter/Flow Controller
SKU: 1984
Availability: InStock

Low flow gas Flow Meter/Flow Controller

$0.00

Gas Flow Range: 2 SCCM~ 30 SL/M, such as 100 ml/min, 200 sccm,1 LPM, 2 SLM,5 liter /minute,20 SLPM .
Turn Down Ratio: 50:1 for digital mass flow controller; 100:1 for digital mass flow meter;
Accuracy : ± 1% F.S
Linearity : ± 0.5% F.S
Repeatability:± 0.2% F.S
Response Time: mass flow controller < 2s; mass flow meter <0.8s
Communication: RS232/485.MODBUS
Output: 0~5V,4-20mA,1-5V
Power Supply : ±15VDC,24VDC
Operation Temperature: 0~50°C
Max operation pressure: 3MPa/10MPa
Mass flow sensor or flow controller material : Stainless steel
Low flow flow meter process connection: Φ3, Φ6, 1/8”, 1/4”

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The low flow rate mass flow controller consists of a low flow mass flow sensor, a laminar flow layering device, a flow controller regulating valve, and an amplification control circuit. It is made by using the heat transfer distribution effect of flowing fluid to change the temperature distribution of the measured capillary wall.
This low flow mass flow controller uses the principle of differential temperature calorimetry before and after capillary heat transfer to measure the mass flow of gas as low as 2 sccm, independent of temperature and pressure. Amplify the flow signal measured by the sensor, and then compare it with the set voltage. Use the difference to drive the control regulating valve, and closed-loop control the flow through the channel to make it equal to the set flow.